碳化硅晶片 
WaferHome can manufacture the high quality Silicon Carbide Wafer(SiC wafer)
Specification for Silicon Carbide Wafer(SiC wafer)
| Grade（等级） | Dimeter（直径） | Polytype | Type/dopant（类型/掺杂） |
Orientaion |
thickness（厚度） | Micropipe Density/ cm-2 | Resistivity（电阻率） | Flat |
Surface/Roughness（表面粗糙度） | Usable area | FWHM |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Ultra | 50.8mm 76.5mm 100mm | 6H | Intrinsic | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 10 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 90% | <50 arcsec |
| 50.8mm 76.5mm 100mm | 6H | N(Nitrogen ) | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 10 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 90% | <50 arcsec | |
| 50.8mm 76.5mm 100mm | 4H | Intrinsic | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 10 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 90% | <50 arcsec | |
| 50.8mm 76.5mm 100mm | 4H | N(Nitrogen ) | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 10 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 90% | <50 arcsec | |
| Production | 25.4mm 50.8mm 76.5mm | 6H | Intrinsic | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 20 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 80% | <50 arcsec |
| 100mm 125mm 150mm | 6H | N(Nitrogen ) | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 20 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 80% | <50 arcsec | |
| 200mm | 4H | Intrinsic | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 20 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 80% | <50 arcsec | |
| 300mm | 4H | N(Nitrogen ) | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 20 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 80% | <50 arcsec | |
| Dummy | 25.4mm 50.8mm 76.5mm | 6H | Intrinsic | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 30 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 70% | <50 arcsec |
| 100mm 125mm 150mm | 6H | N(Nitrogen ) | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 30 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 70% | <50 arcsec | |
| 200mm | 4H | Intrinsic | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 30 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 70% | <50 arcsec | |
| 300mm | 4H | N(Nitrogen ) | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤30 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 70% | <50 arcsec | |