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Grade（等级）	Dimeter（直径）	Polytype	Type/dopant（类型/掺杂）	Orientaion	thickness（厚度）	Micropipe Density/ cm-2	Resistivity（电阻率）	Flat	Surface/Roughness（表面粗糙度）	Usable area	FWHM
Prime	50.8mm 76.5mm 100mm	6H	Intrinsic	<0001> or special orientation	250um+/-20 330um+/- 20 customization	≤ 10	1 - 10 *E10ohm-cm/Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	90%	<50 arcsec
50.8mm 76.5mm 100mm	6H	N(Nitrogen )	<0001> or special orientation	250um+/-20 330um+/- 20 customization	≤ 10	0.001 - 0.1 Ohm-cm /Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	90%	<50 arcsec
50.8mm 76.5mm 100mm	4H	Intrinsic	<100> or special orientation	250um+/-20 330um+/- 20 customization	≤ 10	1 - 10 *E10ohm-cm/Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	90%	<50 arcsec
50.8mm 76.5mm 100mm	4H	N(Nitrogen )	<100> or special orientation	250um+/-20 330um+/- 20 customization	≤ 10	0.001 - 0.1 Ohm-cm /Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	90%	<50 arcsec
test	25.4mm 50.8mm 76.5mm	6H	Intrinsic	<0001> or special orientation	250um+/-20 330um+/- 20 customization	≤ 20	1 - 10 *E10ohm-cm/Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	80%	<50 arcsec
100mm 125mm 150mm	6H	N(Nitrogen )	<0001> or special orientation	250um+/-20 330um+/- 20 customization	≤ 20	0.001 - 0.1 Ohm-cm /Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	80%	<50 arcsec
200mm	4H	Intrinsic	<100> or special orientation	250um+/-20 330um+/- 20 customization	≤ 20	1 - 10 *E10ohm-cm/Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	80%	<50 arcsec
300mm	4H	N(Nitrogen )	<100> or special orientation	250um+/-20 330um+/- 20 customization	≤ 20	0.001 - 0.1 Ohm-cm /Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	80%	<50 arcsec
probation	25.4mm 50.8mm 76.5mm	6H	Intrinsic	<0001> or special orientation	250um+/-20 330um+/- 20 customization	≤ 30	1 - 10 *E10ohm-cm/Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	70%	<50 arcsec
100mm 125mm 150mm	6H	N(Nitrogen )	<0001> or special orientation	250um+/-20 330um+/- 20 customization	≤ 30	0.001 - 0.1 Ohm-cm /Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	70%	<50 arcsec
200mm	4H	Intrinsic	<100> or special orientation	250um+/-20 330um+/- 20 customization	≤ 30	1 - 10 *E10ohm-cm/Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	70%	<50 arcsec
300mm	4H	N(Nitrogen )	<100> or special orientation	250um+/-20 330um+/- 20 customization	≤30	0.001 - 0.1 Ohm-cm /Customization	16mm 22.5mm 32.5mm	polished/etched polished/polished	70%	<50 arcsec

Prime

50.8mm 76.5mm 100mm

6H

Intrinsic

<0001> or special orientation

250um+/-20 330um+/- 20 customization

≤ 10

1 - 10 *E10ohm-cm/Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

90%

<50 arcsec

50.8mm 76.5mm 100mm

6H

N(Nitrogen )

<0001> or special orientation

250um+/-20 330um+/- 20 customization

≤ 10

0.001 - 0.1 Ohm-cm /Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

90%

<50 arcsec

50.8mm 76.5mm 100mm

4H

Intrinsic

<100> or special orientation

250um+/-20 330um+/- 20 customization

≤ 10

1 - 10 *E10ohm-cm/Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

90%

<50 arcsec

50.8mm 76.5mm 100mm

4H

N(Nitrogen )

<100> or special orientation

250um+/-20 330um+/- 20 customization

≤ 10

0.001 - 0.1 Ohm-cm /Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

90%

<50 arcsec

test

25.4mm 50.8mm 76.5mm

6H

Intrinsic

<0001> or special orientation

250um+/-20 330um+/- 20 customization

≤ 20

1 - 10 *E10ohm-cm/Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

80%

<50 arcsec

100mm 125mm 150mm

6H

N(Nitrogen )

<0001> or special orientation

250um+/-20 330um+/- 20 customization

≤ 20

0.001 - 0.1 Ohm-cm /Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

80%

<50 arcsec

200mm

4H

Intrinsic

<100> or special orientation

250um+/-20 330um+/- 20 customization

≤ 20

1 - 10 *E10ohm-cm/Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

80%

<50 arcsec

300mm

4H

N(Nitrogen )

<100> or special orientation

250um+/-20 330um+/- 20 customization

≤ 20

0.001 - 0.1 Ohm-cm /Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

80%

<50 arcsec

probation

25.4mm 50.8mm 76.5mm

6H

Intrinsic

<0001> or special orientation

250um+/-20 330um+/- 20 customization

≤ 30

1 - 10 *E10ohm-cm/Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

70%

<50 arcsec

100mm 125mm 150mm

6H

N(Nitrogen )

<0001> or special orientation

250um+/-20 330um+/- 20 customization

≤ 30

0.001 - 0.1 Ohm-cm /Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

70%

<50 arcsec

200mm

4H

Intrinsic

<100> or special orientation

250um+/-20 330um+/- 20 customization

≤ 30

1 - 10 *E10ohm-cm/Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

70%

<50 arcsec

300mm

4H

N(Nitrogen )

<100> or special orientation

250um+/-20 330um+/- 20 customization

≤30

0.001 - 0.1 Ohm-cm /Customization

16mm 22.5mm 32.5mm

polished/etched polished/polished

70%

<50 arcsec

碳化硅晶片

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Specification for Silicon Carbide Wafer(SiC wafer)